Title :
High response time micro scale thermo-couple for biological applications
Author :
Gillot, F. ; Tixier-Mita, A. ; Morin, Franck ; Jita, H.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ.
Abstract :
We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2times2 mum area. Our micro TFTC shows a simulated response time of 0.35 ms when used in air (for DeltaTap55 K), and 1.5 ms when used in water (for DeltaTap41 K)
Keywords :
biological techniques; chromium; microsensors; molecular biophysics; platinum; silicon compounds; sputter etching; temperature sensors; thermocouples; thin film sensors; 2 micron; Cr; F1ATPase biomolecular motor rotation; Pt; RIE; SiO2; biological applications; chromium sputtering; glass substrate; microscale thermo-couple sensor design; platinum sputtering; platinum wire; reactive ion etching; silica sputtering; simulated response time; temperature-dependant phenomena; thin film thermo-couple manufacturing; Biological systems; Biosensors; Chromium; Delay; Manufacturing; Platinum; Real time systems; Sensor phenomena and characterization; Sputtering; Wires; Glass Support; Response Time; Thin Film Thermo-couple;
Conference_Titel :
Microtechnologies in Medicine and Biology, 2006 International Conference on
Conference_Location :
Okinawa
Print_ISBN :
1-4244-0337-5
Electronic_ISBN :
1-4244-0338-3
DOI :
10.1109/MMB.2006.251508
