Title :
Concurrent enhancement of Q and power handling in multi-tether high-order extensional resonators
Author :
Shahmohammadi, Mohsen ; Harrington, Brandon P. ; Abdolvand, Reza
Author_Institution :
Oklahoma State Univ., Tulsa, OK, USA
Abstract :
In this paper we demonstrate that quality factor (Q) and power handling, two inherently divergent characteristics of a resonator, can be improved simultaneously by designing high-order harmonic resonant structures anchored with multiple tethers. We show that in thin-film piezoelectric-on-substrate (TPoS) resonators, the quality factor is significantly altered by varying the thickness of the resonator, but the power handling of the resonator is often traded off for the higher Q. Quality factors measured from TPoS resonators fabricated on a 30 μm thick silicon substrate are up to 3 times higher than the values measured for devices on 20 μm thick substrate while maximum deliverable power (at the point of bifurcation) to the same device is reduced from 2.5 dBm to -0.3 dBm. In contrast, it is observed that the maximum deliverable power in a multi-tether ~1GHz resonator is enhanced by more than 5 dBm compared to an identical single-pair tethered resonator (7dBm versus 1.9dBm) and the quality factor is also increased by 55%.
Keywords :
Q-factor; crystal resonators; micromechanical resonators; oscillators; phase noise; thin film devices; high-order harmonic resonant structure design; microresonators; multitether high-order extensional resonators; nonlinear oscillators; phase noise; power handling; quality factor concurrent enhancement; single-pair tethered resonator; size 20 mum; size 30 mum; thin-film piezoelectric-on-substrate resonators; Piezoelectric films; Power measurement; Power system harmonics; Q factor; Q measurement; Resonance; Semiconductor thin films; Substrates; Thickness measurement; Thin film devices; Microresonators; Q factor; nonlinear oscillators; nonlinearities; phase noise; piezoelectric resonators;
Conference_Titel :
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-6056-4
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2010.5517756