Fabrication and Evaluation of the Flexible and Implantable Soft Micro Electrode for Retinal Prosthesis

This paper presents a polydimethylsiloxane (PDMS)-based flexible and implantable micro electrode for the retinal prosthesis. The patterning of the electrode and the wires was performed through the photolithography and chemical etching process after e-beam deposition Ti and Au, and the thick electrode was fabricated through the electroplating process. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 45 days. The electrode was implanted under the retina of rabbit´s eye to investigate the feasibility as a retinal prosthesis