DocumentCode
3146937
Title
Nano-gap fabrication by focused ion beam for DNA trapping
Author
Kumemura, Momoko ; Tamura, Keiichi ; Hashiguchi, Gen ; Collard, Doifique ; Fujita, Hiroyuki
Author_Institution
Inst. of Ind. Sci., Tokyo Univ.
fYear
2006
fDate
9-12 May 2006
Firstpage
271
Lastpage
272
Abstract
Micromachined tweezers is having nanometer sized gap was fabricated with a silicon etching method and a focussed ion beam technique. The gap of tweezer fabricated by this process was accomplished to be 15 nm-2 mum ranges. The validity of this tweezers was demonstrated by trapping DNA molecules. Trapping of bundle of lambda-DNA molecules between 100 mum gap was succeeded
Keywords
DNA; biological techniques; focused ion beam technology; genetics; micromachining; molecular biophysics; nanotechnology; silicon; sputter etching; focused ion beam technique; lambda-DNA molecule trapping; micromachined tweezer; nanometer sized gap fabrication; silicon etching method; Conducting materials; DNA; Electron traps; Fabrication; Ion beams; Micromachining; Nanobioscience; Probes; Scanning electron microscopy; Silicon; Focusedion beam; Micromahineing; Molecular manipulation; Nano-gap; ¿-DNA;
fLanguage
English
Publisher
ieee
Conference_Titel
Microtechnologies in Medicine and Biology, 2006 International Conference on
Conference_Location
Okinawa
Print_ISBN
1-4244-0338-3
Electronic_ISBN
1-4244-0338-3
Type
conf
DOI
10.1109/MMB.2006.251547
Filename
4281365
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