• DocumentCode
    3147044
  • Title

    Micro power generator with high-performace polymer electret

  • Author

    Suzuki, Yuji ; Edamoto, Masato ; Kasagi, Nobuhide ; Kashiwagi, Kimiaki ; MORIZAWA, Yoshitomi

  • Author_Institution
    Dept. of Mech. Eng., Univ. of Tokyo, Tokyo
  • fYear
    2008
  • fDate
    15-17 Sept. 2008
  • Abstract
    Vibration-driven electret generator has been developed with the aid of MEMS technologies. Parylene high-aspect-ratio spring is successfully microfabricated to support an in-plane seismic mass. Resonant frequency as low as 37Hz has been achieved with a large in-plane amplitude of 1 mm. With our early prototype, we have obtained 21 Vp-p voltage output.
  • Keywords
    electrets; electric generators; micromechanical devices; polymers; MEMS technology; micro power generator; parylene; polymer electret; resonant frequency; vibration-driven electret generator; Electrets; Electrodes; Glass; Induction generators; Micromechanical devices; Polymers; Power generation; Resonant frequency; Springs; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrets, 2008. ISE-13. 13th International Symposium on
  • Conference_Location
    Tokyo
  • Print_ISBN
    978-1-4244-1850-3
  • Electronic_ISBN
    978-1-4244-1851-0
  • Type

    conf

  • DOI
    10.1109/ISE.2008.4814034
  • Filename
    4814034
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3147044