Title :
Linear piezoelectric step motors
Author :
Yen, K. ; Yang, C. ; Roig, G.
Author_Institution :
Dept. of Electr. Eng., Florida Int. Univ., Miami, FL, USA
Abstract :
The design of a linear step motor using piezoelectric material is presented. The principle of operation is based on the characteristics of piezoelectric ceramics, which have a relationship between pressure and voltage. This motor can achieve a very-high-precision positioning. The resolution can be as high as 0.1 μm to 10 Å, depending on the operating voltages and the dimension of the piezoelectric ceramic for a specific application. Due to the slow response of the mechanical clutches, the system cannot be driven very fast. It takes 104 s to generate a 2.74 cm displacement
Keywords :
linear motors; piezoelectric motors; stepping motors; linear step motor; mechanical clutches; piezoelectric ceramics; piezoelectric motor; very-high-precision positioning; Ceramics; Crystalline materials; Crystallization; Electrodes; Micromotors; Piezoelectric materials; Piezoelectric transducers; Stress; Ultrasonic transducers; Voltage;
Conference_Titel :
Southeastcon '90. Proceedings., IEEE
Conference_Location :
New Orleans, LA
DOI :
10.1109/SECON.1990.117761
