CMU-CAM System

This paper describes a software system for Computer Aided Manufacturing (CAM) of VLSI circuits being developed at Carnegie-Mellon University. In developing the system, a major effort was devoted towards the computational efficiency of the algorithms implemented. The results obtained with this system indicate that it can be used for a variety of real-life tasks, such as optimal process design, process diagnosis and control, in commercial fabrication lines. We believe that such a system provides an attractive extension for the CAM systems that are currently being introduced to VLSI fabrication processes.