Title :
2009 IEEE International Conference on Microelectronic Test Structures
fDate :
March 30 2009-April 2 2009
Abstract :
The following topics are dealt with: device characterisation; MEMS sensors; process characterisation; parameter extraction; CD metrology; and capacitance.
Keywords :
capacitance; microsensors; CD metrology; MEMS sensors; capacitance; device characterisation; parameter extraction; process characterisation;
Conference_Titel :
Microelectronic Test Structures, 2009. ICMTS 2009. IEEE International Conference on
Conference_Location :
Oxnard, CA
Print_ISBN :
978-1-4244-4259-1
DOI :
10.1109/ICMTS.2009.4814591
