Automated Test Structure Generation for Characterizing Plasma Induced Damage in MOSFET D vices

Test structures used to study the effects of plasma induced damage are complex and time intensive to design; performance problems due to poorly designed components of the structure often confound the desired result. This paper presents a parameterized and hierarchical antenna test structure template that enables the user to characterize the test structure performance and identify safe design guidelines early in process development. The template is implemented in a system that automates structure generation, placement, routing, and test plan development.