Title :
Single mode edge-emitting lasers using optical lithography
Author :
Percival, C. ; Lambkin, P. ; Corbett, B.
Author_Institution :
Photonics Group, Nat. Microelectron. Res. Centre, Cork, Ireland
Abstract :
In this paper, we present an optical lithography process that introduces slot perturbations into a ridge waveguide InGaAsP laser. A fast-Fourier transform (FFT) of emission spectra below threshold has been used to verify the location of the slot and can be used as a method for measuring the loss introduced by the slot.
Keywords :
Fourier transform optics; III-V semiconductors; gallium arsenide; indium compounds; laser modes; photolithography; ridge waveguides; semiconductor lasers; waveguide lasers; wavelength division multiplexing; InGaAsP; InGaAsP laser; emission spectra; fast-Fourier transform; optical lithography; ridge waveguide; single mode edge-emitting laser; slot perturbation; Displays; Laser modes; Lithography; Optical losses; Optical waveguides; Semiconductor laser arrays; Semiconductor lasers; Stimulated emission; Waveguide lasers; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1312254
