Title :
High Frequency SU-8 Based Transmission Line for 3-D Millimeter-wave Antennas
Author :
Lee, Sae-Won ; Parameswaran, Ash M. ; Vaughan, Rodney G. ; Mahanfar, Alireza
Author_Institution :
Inst. of Micromachine & Microfabrication Res., Simon Fraser Univ., Burnaby, BC
Abstract :
A fabrication method and characterization of transmission lines for 3-D millimeter-wave antennas are presented using a polymer micro-electro-mechanical-systems (MEMS) fabrication process. The fabrication process steps are performed at low temperatures and are compatible for on-chip CMOS integration. Blanket metal deposition is applied to the wafer to coat the structures with Au and Cr and electrical isolation is achieved by anchor designs.
Keywords :
CMOS integrated circuits; chromium; field effect MIMIC; gold; micromechanical devices; millimetre wave antennas; transmission lines; 3D millimeter-wave antenna; Au; Cr; MEMS fabrication process; blanket metal deposition; electrical isolation; high frequency SU-8 based transmission line; on-chip CMOS integration; polymer microelectro-mechanical-system; CMOS process; Chromium; Fabrication; Frequency; Gold; Micromechanical devices; Millimeter wave technology; Polymers; Temperature; Transmission line antennas; Microelectromechanical devices; Polymers; Transmission lines;
Conference_Titel :
Signal Integrity and High-Speed Interconnects, 2009. IMWS 2009. IEEE MTT-S International Microwave Workshop Series on
Conference_Location :
Guadalajara
Print_ISBN :
978-1-4244-2742-0
Electronic_ISBN :
978-1-4244-2743-7
DOI :
10.1109/IMWS.2009.4814918
