80V HVDMOS reliability characterization for 0.6μm and 0.35μm technologies

Integrated logic combined with high voltage (HV) capability for products such as low Ron MEMs switches, charge pumping applications and automotive products such as battery sensors and oil level sensors has led to the development of an 80 V HVDMOS process option at ADLK. The devices which dominate this development from a HV point of view are the 80V HVDMOS devices and the 80 V met2/thin film HV capacitor. This work summarizes the device level characterization using hot carrier (HC) testing to successfully qualify these HVNDMOS devices. In particular, the difficulties experienced in generating ´real´ hot carrier degradation data resulting from a thermal effect leading to abnormal hot carrier degradation during the initial characterization of HVNDMOS devices, is highlighted.