Title :
Microstructure And Adhesion In Al And Ain Thin Film System
Author :
Amamoto, Yoshiki ; Uchiyrrma, S. ; Watanabe, Yoshihisa ; Nakamura, Yoshikazu
Keywords :
Adhesives; Artificial intelligence; Ion beams; Microstructure; Nitrogen; Semiconductor films; Sputtering; Substrates; Temperature; Transistors;
Conference_Titel :
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]
Conference_Location :
IEEE
Print_ISBN :
0-7803-4235-6
