DocumentCode :
315458
Title :
Characterization And Preparation Of Piezoelectric Component With Working Conditions By Using RF-Magnetron Sputtering Process
Author :
Park, Myung-Sik ; Kim, Dong-Bum ; Cho, Sang-Wee
fYear :
1997
fDate :
16-18 April 1997
Firstpage :
137
Lastpage :
141
Keywords :
Chemical vapor deposition; Dielectric materials; Employee welfare; Optical materials; SAW filters; Semiconductor films; Semiconductor thin films; Sputtering; Substrates; Surface morphology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]
Conference_Location :
IEEE
Print_ISBN :
0-7803-4235-6
Type :
conf
Filename :
618993
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=315458
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