Title : 
A New Approach To Cu-cu Direct Bump Bonding
         
        
            Author : 
Suga, Tadatomo ; Yuuki, Fumio ; Hosoda, Naoe
         
        
        
        
        
        
            Keywords : 
Argon; Atomic beams; Electrical resistance measurement; Filling; Large scale integration; Packaging; Semiconductor device measurement; Substrates; Temperature; Wafer bonding;
         
        
        
        
            Conference_Titel : 
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]
         
        
            Conference_Location : 
IEEE
         
        
            Print_ISBN : 
0-7803-4235-6