Title :
Surface Improvement Method For Controlling Oxidation Of Low Melting Point Metal -surface Improvement By Ge Implantation Into In Surface
Author :
Kawakita, Testuo ; Hatada, Kenzo
Keywords :
Electrons; Germanium; Heat treatment; Indium; Oxidation; Semiconductor films; Silicon; Spectroscopy; Surface resistance; Surface treatment;
Conference_Titel :
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]
Conference_Location :
IEEE
Print_ISBN :
0-7803-4235-6
