A simulation-based method for the capacity economics of semiconductors manufacturing fabs

This paper develops a decision support method for the capacity optimization of semiconductors manufacturing enterprise. In it, we intend to find the wafer fabs configuration considering the production throughput and the capital investment so that the production economic can be achieved. This method applies the idea of X-factory, which is widely used in the semiconductors industry, to develop the decision logic. In the optimization process, the eM-Plant based computer simulation model is applied to estimate the economic performance of each candidate configuration. An application case of 200 mm wafer manufacturing fab with 28 product types and 10 processing area shows the quality of the developed method.