Computer-aided design of asymmetric stripline for multichip module applications

Summary form only given. Design of interconnect has become the key to the success of the high performance ULSI, multilevel metallization systems for the multichip module. Computer-aided design of the characteristic impedances, capacitance, and working frequency of Al asymmetric stripline filled by anodic oxide of Al with a dielectric constant 4-6 for a multilayer scheme in hybrid multichip module. RLC-model of the Al transmission line was successfully used for the calculation of frequency. Using conformal mapping, the functional dependance of the characteristic impedance and frequency from the capacitance of a filled anodic oxide Al stripline can be determined. To evaluate this model and characterise its performance with highspeed electrical multichip module design, a test cell using a multilayer interconnect structure Al/anodic Al oxide on an aluminum substrate was developed.