Title :
Capabilities of a 10 GHz MEMS based VCO
Author :
Coustou, A. ; Dubuc, D. ; Grenier, K. ; Fourn, E. ; Llopis, O. ; Plana, R.
Author_Institution :
LAAS-CNRS, Univ. de Toulouse
Abstract :
This paper report on the investigation of a MEMS based voltage controlled oscillator (VCO) at 10 GHz. The authors report that the MEMS IC concept turns out to a 8 dB phase noise improvement and 4 dB output power improvement at 10 GHz, compared to the MMIC technology using P+/Nwell varactors. Measurements have shown an improvement of resonator´s quality factor of MEMS technology compared to MMIC technology. It is proposed a new design that takes into account these behaviors. The new MEMS based VCO is under construction and it should feature -87dBc/Hz @ 10 GHz offset with 4 dBm output power
Keywords :
MMIC oscillators; micromechanical resonators; phase noise; voltage-controlled oscillators; 10 GHz; MEMS; MMIC oscillators; micromechanical devices; phase noise improvement; voltage controlled oscillator; Assembly; Germanium silicon alloys; MMICs; Micromechanical devices; Phase noise; Q factor; Radio frequency; Silicon germanium; Varactors; Voltage-controlled oscillators;
Conference_Titel :
European Microwave Integrated Circuits Conference, 2006. The 1st
Conference_Location :
Manchester
Print_ISBN :
2-9600551-8-7
DOI :
10.1109/EMICC.2006.282775
