DocumentCode :
3157073
Title :
Pulsed laser deposition (PLD) of ferroelectric thin films in conjunction with superconducting oxides
Author :
Sengupta, S. ; Sengupta, L.C. ; Kosik, W.E.
Author_Institution :
Metals/Ceramics Div., US Army Res. Lab., Watertown, MA, USA
fYear :
1991
fDate :
33457
Firstpage :
431
Lastpage :
434
Abstract :
The possibility of combining ferroelectrics and superconductors has been of interest for use in memory storage devices. Additionally, superconductors offer crystal structures compatible to the epitaxial growth of the ferroelectric, Ba0.6Sr0.4TiO3 (BSTO), which is cubic at this stoichiometry. BSTO has a lattice constant of 3.94 Å as compared to the superconducting Pr2-x CexCuO4 tetragonal single crystal which also has a lattice constant of a=3.94 Å. In this study, ferroelectric thin films of BSTO were deposited on single crystals of Pr2CuO4 and Pr2-xCexCuO4. The optical constants of the substrates, single crystals of Pr2CuO4 and Pr 2-xCexCuO4, were determined using Variable Angle Spectroscopic Ellipsometry (VASE) and the composition and crystal structure were examined using Rutherford Backscattering Spectrometry (RBS) with ion beam channeling. The substrate/film interfaces and the compositional variation in the films were also studied with RBS and with SEM/EDS. Glancing angle X-ray diffraction was used to verify the epitaxial nature of the films. The effect of the deposition parameters (laser repetition rate, oxygen backfill pressure, and deposition geometry) on the quality of the films was experimented with and the optimized parameters were used
Keywords :
Rutherford backscattering; X-ray diffraction; barium compounds; ellipsometry; epitaxial layers; ferroelectric materials; ferroelectric storage; ferroelectric thin films; lattice constants; optical constants; pulsed laser deposition; stoichiometry; strontium compounds; vapour phase epitaxial growth; (PrCe)2CuO4; Ba0.6Sr0.4TiO3; Pr2-xCexCuO4 tetragonal single crystal; Rutherford Backscattering Spectrometry; Variable Angle Spectroscopic Ellipsometry; compositional variation; crystal structures; cubic; deposition geometry; ferroelectric thin films; ion beam channeling; laser repetition rate; lattice constant; memory storage devices; optical constants; oxygen backfill pressure; pulsed laser deposition; stoichiometry; substrate/film interfaces; superconducting oxides; Crystals; Ferroelectric materials; Lattices; Optical pulses; Pulsed laser deposition; Spectroscopy; Sputtering; Substrates; Superconducting devices; Superconducting thin films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
Type :
conf
DOI :
10.1109/ISAF.1994.522394
Filename :
522394
Link To Document :
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