Title :
Lower temperature crystallization and ordering in sol-gel derived Pb(Sc0.5Ta0.5)O3 powders and thin layers
Author :
Liu, Donhang ; Payne, David A.
Author_Institution :
Dept. of Mater. Sci. & Eng., Illinois Univ., Urbana, IL, USA
Abstract :
Lead scandium tantalate (PST) was prepared by sol-gel processing, and the crystallization into the perovskite phase was determined at reduced temperatures (600-700°C). The extent of B-site cation ordering was also determined as a function of cooling conditions. Results are reported for the integration of capacitors on silicon with a capacitance density greater than 200 fF/μm2. A preferred (111) orientation was obtained, with (½½½) B-site cation partial ordering. No evidence was obtained for A-site Pb vacancy ordering. Results are reported for X-ray diffraction and selected-area electron diffraction investigations
Keywords :
X-ray diffraction; crystallisation; ferroelectric materials; ferroelectric thin films; lead compounds; powders; sol-gel processing; vacancies (crystal); ( 1/2 1/2 1/2 ) B-site cation partial ordering; 600 to 700 C; B-site cation ordering; Pb(Sc0.5Ta0.5)O3; Pb(Sc0.5Ta0.5)O3 powders; X-ray diffraction; capacitance density; capacitors integration on Si; cooling conditions; crystallization; perovskite phase; selected-area electron diffraction; sol-gel processing; thin layers; Contacts; Crystallization; Electrodes; Heat treatment; Lead; Phase estimation; Powders; Reflection; Temperature; X-ray scattering;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522395
