Title :
Properties of PbTiO3 grown by the multiple magnetron sputtering method
Author :
Hoffman, R.C. ; Deb, K.K. ; Jackson, D.A.
Author_Institution :
Army Res. Lab., Fort Belvoir, VA, USA
Abstract :
Deposition behavior of lead titanate as grown on silicon substrates by the multiple magnetron sputtering method from metallic titanium and lead targets has been investigated. The films have been analyzed by RBS, SEM and X-ray diffraction to determine film composition, structure, and morphology. The perovskite phase of PbTiO 3 has been observed. Preliminary dielectric measurements indicate an εr of about 75 with a high loss tangent. The films will be used to fabricate a dynamic test device with the ultimate goal of fabricating a high performance uncooled infrared sensor array
Keywords :
Rutherford backscattering; X-ray diffraction; dielectric losses; ferroelectric devices; ferroelectric thin films; lead compounds; permittivity; scanning electron microscopy; sputter deposition; PbTiO3; RBS; SEM; Si; Si substrates; X-ray diffraction; dynamic test device; ferroelectric thin films; film composition; high performance uncooled infrared sensor array; loss tangent; morphology; multiple magnetron sputtering; perovskite phase; Dielectric measurements; Dielectric substrates; Lead; Magnetic analysis; Morphology; Sensor arrays; Silicon; Sputtering; Titanium compounds; X-ray diffraction;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522407
