• DocumentCode
    3157991
  • Title

    Properties of PbTiO3 grown by the multiple magnetron sputtering method

  • Author

    Hoffman, R.C. ; Deb, K.K. ; Jackson, D.A.

  • Author_Institution
    Army Res. Lab., Fort Belvoir, VA, USA
  • fYear
    1991
  • fDate
    33457
  • Firstpage
    480
  • Lastpage
    481
  • Abstract
    Deposition behavior of lead titanate as grown on silicon substrates by the multiple magnetron sputtering method from metallic titanium and lead targets has been investigated. The films have been analyzed by RBS, SEM and X-ray diffraction to determine film composition, structure, and morphology. The perovskite phase of PbTiO 3 has been observed. Preliminary dielectric measurements indicate an εr of about 75 with a high loss tangent. The films will be used to fabricate a dynamic test device with the ultimate goal of fabricating a high performance uncooled infrared sensor array
  • Keywords
    Rutherford backscattering; X-ray diffraction; dielectric losses; ferroelectric devices; ferroelectric thin films; lead compounds; permittivity; scanning electron microscopy; sputter deposition; PbTiO3; RBS; SEM; Si; Si substrates; X-ray diffraction; dynamic test device; ferroelectric thin films; film composition; high performance uncooled infrared sensor array; loss tangent; morphology; multiple magnetron sputtering; perovskite phase; Dielectric measurements; Dielectric substrates; Lead; Magnetic analysis; Morphology; Sensor arrays; Silicon; Sputtering; Titanium compounds; X-ray diffraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
  • Conference_Location
    University Park, PA
  • Print_ISBN
    0-7803-1847-1
  • Type

    conf

  • DOI
    10.1109/ISAF.1994.522407
  • Filename
    522407
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3157991