• DocumentCode
    3158076
  • Title

    RF-sputtered LiNbO3 films for piezoelectric applications

  • Author

    Bakirov, Azamat ; Margolin, Aron ; Resnichenko, Larisa ; Sviridov, Evgeny ; Dudkevich, Vladimir

  • Author_Institution
    Inst. of Phys., Rostov State Univ., Russia
  • fYear
    1991
  • fDate
    33457
  • Firstpage
    488
  • Lastpage
    490
  • Abstract
    Polycrystalline LiNbO3 films on the stainless steel substrates fabricated by rf cathode sputtering with no preliminary polarisation had the effective longitudinal piezoelectric modulus d33=(6.0÷8.5)·10-12 CN. This value is 60-80 percent of d33 for the poled ceramics of the same composition and 30-40 percent of d33 for the ceramics determined from the dij values for a single crystal (a superficial estimation). The high “self-polarisation” of LiNbO3 films first observed by Foster may be a result of their growth in a ferroelectric phase. Some characteristics of models of the dynamic strain sensors based on LiNbO3 films are described
  • Keywords
    dielectric polarisation; ferroelectric thin films; lithium compounds; piezoelectricity; sputter deposition; LiNbO3; RF-sputtered films; cathode sputtering; dynamic strain sensors; ferroelectric phase; longitudinal piezoelectric modulus; polycrystalline films; self-polarisation; stainless steel substrates; Capacitive sensors; Cathodes; Ceramics; Ferroelectric films; Ferroelectric materials; Piezoelectric films; Piezoelectric polarization; Sensor phenomena and characterization; Sputtering; Steel;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
  • Conference_Location
    University Park, PA
  • Print_ISBN
    0-7803-1847-1
  • Type

    conf

  • DOI
    10.1109/ISAF.1994.522410
  • Filename
    522410
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3158076