Title :
RF-sputtered LiNbO3 films for piezoelectric applications
Author :
Bakirov, Azamat ; Margolin, Aron ; Resnichenko, Larisa ; Sviridov, Evgeny ; Dudkevich, Vladimir
Author_Institution :
Inst. of Phys., Rostov State Univ., Russia
Abstract :
Polycrystalline LiNbO3 films on the stainless steel substrates fabricated by rf cathode sputtering with no preliminary polarisation had the effective longitudinal piezoelectric modulus d33=(6.0÷8.5)·10-12 CN. This value is 60-80 percent of d33 for the poled ceramics of the same composition and 30-40 percent of d33 for the ceramics determined from the dij values for a single crystal (a superficial estimation). The high “self-polarisation” of LiNbO3 films first observed by Foster may be a result of their growth in a ferroelectric phase. Some characteristics of models of the dynamic strain sensors based on LiNbO3 films are described
Keywords :
dielectric polarisation; ferroelectric thin films; lithium compounds; piezoelectricity; sputter deposition; LiNbO3; RF-sputtered films; cathode sputtering; dynamic strain sensors; ferroelectric phase; longitudinal piezoelectric modulus; polycrystalline films; self-polarisation; stainless steel substrates; Capacitive sensors; Cathodes; Ceramics; Ferroelectric films; Ferroelectric materials; Piezoelectric films; Piezoelectric polarization; Sensor phenomena and characterization; Sputtering; Steel;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522410
