Title :
The control of ferroelectric film texture upon rf sputtering
Author :
Bakirov, Azamat ; Sviridov, Evgeny ; Dudkevich, Vladimir
Author_Institution :
Inst. of Phys., Rostov State Univ., Russia
Abstract :
Polycrystalline Pb(Zr0.53Ti0.45W0.01 Cd0.01)O3 films on the stainless steel substrates were fabricated by rf sputtering of stoichiometric ceramic targets in an O2 atmosphere. The effect of potential Ub biasing the substrate with respect to the high-frequency discharge plasma on film microstructure was studied. It was established that the main effect is the formation of the (001) texture at Ub <-20 V on nonorienting substrates. The origin of this effect is discussed
Keywords :
crystal microstructure; ferroelectric thin films; lead compounds; sputter deposition; texture; PbZr0.53Ti0.45W0.01Cd0.01O3; RF sputtering; ferroelectric film; microstructure; polycrystalline films; stainless steel substrates; texture; Crystal microstructure; Crystallization; Ferroelectric films; Optical films; Plasma temperature; Radio frequency; Reflection; Sputtering; Substrates; X-ray diffraction;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522414
