Design of CMOS Spiral Inductors for Effective Broadband Shielding

Author

Chiang, Meng-Ju ; Wu, Hsien-Shun ; Tzuang, Ching-Kuang C.

Author_Institution

Graduate Inst. of Commun. Eng., National Taiwan Univ., Taipei

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

48

Lastpage

51

Abstract

Design of a CMOS spiral inductor of significantly reduced coupling to the adjacent inductor is presented. The synthetic quasi-TEM transmission line (TL), or the so-called complementary-conducting-strip transmission line (CCS TL), is applied to realize the proposed inductor and simultaneously shield electromagnetic coupling from the adjacent inductor by the existing meshed ground plane of the CCS TL. Several coupled inductors at edge-to-edge spacing of 90 mum, 170 mum, and 250 mum were fabricated by the 1P6M (one poly-layer and six metal layers) 0.18 mum CMOS process, demonstrating excellent broadband shielding characteristics of approximately 30-to-40 dB improvement below 5 GHz and 15 dB improvement at 20 GHz when compared with the same spirals integrated on the CMOS substrate directly without shields

Keywords

CMOS integrated circuits; field effect MMIC; inductors; shielding; 0.18 micron; 1P6M; 20 GHz; CMOS process; CMOS spiral inductors; broadband shielding; complementary-conducting-strip transmission line; edge-to-edge spacing; electromagnetic coupling shielding; one poly-layer six metal layers; synthetic quasi-TEM transmission line; transverse electromagnetics; CMOS process; Carbon capture and storage; Design engineering; Electromagnetic coupling; Frequency; Inductors; Microwave communication; Q factor; Spirals; Transmission lines; CMOS; complementary-conducting-strip transmission line (CCS TL); coupling; cross-talk; quasi-TEM; spiral inductor;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. 36th European

Conference_Location

Manchester

Print_ISBN

2-9600551-6-0

Type

conf

DOI

10.1109/EUMC.2006.281178

Filename

4057743