Title :
Study of electrostatic torsion micromirrors for digital and analog light processing
Author :
Bochobza-Degani, Ofir ; Nemirovsky, Yael
Author_Institution :
Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel
Abstract :
This paper will systematically compare the measured results of electrostatic torsion micromirrors; with various design parameters, namely: the actuator shape, location of bottom electrode and aspect ratio of the suspending beam. The results of this study are instrumental for the design of torsion micromirrors with new efficient simulation methodology, achieving extended travel range and minimizing the applied voltage required for their operation.
Keywords :
electrostatic devices; micromirrors; optical information processing; torsion; analog light processing; digital light processing; electrostatic torsion micromirror; Displacement measurement; Electrodes; Electrostatic actuators; Electrostatic measurements; Instruments; Micromirrors; Optical devices; Semiconductor device modeling; Shape measurement; Voltage;
Conference_Titel :
Electrical and Electronics Engineers in Israel, 2002. The 22nd Convention of
Print_ISBN :
0-7803-7693-5
DOI :
10.1109/EEEI.2002.1178316
