Realization of high-speed measurement AM-FM using surface topography learning observers

This paper addresses an amplitude modulation dynamic mode atomic force microscope (AM-AFM). AFM is an equipment which can measure nanoscale surface topography of the given sample. It is also known that measurement time is very long. Therefore, high-speed measurement is required in many industrial applications. In general AFMs, most common approach is only classical feedback control. This paper proposes two feedforward compensation methods by surface topography learning observer based on surface topography observer. These proposed methods archive high-speed measurement in simulation and experimental results.