Title :
From simple devices to promising microsystem applications
Author :
Lerch, Ph. ; Dubochet, O. ; Renaud, Ph
Author_Institution :
Microsyst. Inst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Abstract :
We discuss both limitations and potentialities of micromechanical devices based on simple microtechnologies. We briefly review flow sensors and their applications. Underlying technologies and prospective applications are discussed
Keywords :
flow measurement; flowmeters; membranes; microsensors; dielectric membranes; micromachined flow sensors; micromechanical devices; microsystem applications; microtechnologies; Biomedical measurements; Biomembranes; Biosensors; Etching; Fluid flow measurement; Heat transfer; Plasma temperature; Silicon; Temperature sensors; Wire;
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-3664-X
DOI :
10.1109/ICMEL.1997.625181
