Encapsulated double-bump WL-CSP: design and reliability

A new type of wafer level package has been designed and fabricated by using an encapsulation material, which is applied directly to a bumped wafer, thereby eliminating the underfill process, and protecting all the bumps on the wafer at once in a batch process. This material was designed to have the necessary elastic modulus and coefficient of thermal expansion required by this application. After application of the encapsulation, the wafer is then bumped again with C5 balls, creating a double bump structure that increases the overall bump height to improve the reliability further. Redistribution of bondpads from the die periphery to an area array using BCB and redistribution metal aids in eliminating the need for an interposer. This wafer level chip-scale package (WL-CSP) technology has been evaluated using a test vehicle, which has a 0.5 mm pitch of an 8×8 array of bumps on a 5×5 mm² die. Micro Moire Interferometry has shown that the encapsulation layer facilitates the distribution of stress throughout the wafer level bumps. The bump structure and package geometry have been optimized using simulation and validated by experimentation to insure contact between the encapsulation and first level bump, which is key to reducing stress and improving reliability. Initial package and board level reliability data are reported