DocumentCode

3161425

Title

An Electrical Test Structure For Measuring Contact Size

Author

Freeman, Greg ; Lukaszek, W.

Author_Institution

Stanford University

fYear

1988

fDate

22-23 Feb. 1988

Firstpage

9

Lastpage

14

Keywords

Contacts; Electric variables measurement; Filtering; Microelectronics; Noise measurement; Size measurement; Strips; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on

Conference_Location

Long Beach, CA, USA

Type

conf

DOI

10.1109/ICMTS.1988.672920

Filename

672920