Title :
An Electrical Test Structure For Measuring Contact Size
Author :
Freeman, Greg ; Lukaszek, W.
Author_Institution :
Stanford University
Keywords :
Contacts; Electric variables measurement; Filtering; Microelectronics; Noise measurement; Size measurement; Strips; Testing;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672920
