Title :
Sources Of Error In Extracting The Specific Contact Resistance From Kelvin Device Measurements
Author :
Alexander, W.J.C. ; Walton, A.J.
Author_Institution :
Edinbqrgh University
Keywords :
Analytical models; Contact resistance; Electric resistance; Electrical resistance measurement; Finite element methods; Geometry; Integrated circuit interconnections; Kelvin; Proximity effect; Testing;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672922
