Title :
Femtosecond micromachining applications for electro-optic components
Author :
Leong, K.H. ; Said, A.A. ; Maynard, R.L.
Author_Institution :
Electro-Opt. Center, Penn State Appl. Res. Lab., Kittanning, PA, USA
Abstract :
This paper investigates applications of femtosecond lasers in the improved manufacturing of microelectronic and electrooptic components. It examines the requirements for a precision laser micromachining system and discusses the capability of a commercially available laser systems to micromachine feature sizes from 1 mm down to submicron depths for a variety of materials including ceramics, metals, polymers and transparent materials. The precise nature of the ablation process can be utilized to carry out precision shaping of microfeatures for a particular application. Aspect ratios of 100 μm smooth holes obtained can be greater than 10. No post processing is required and the substrate is unaffected
Keywords :
electro-optical devices; laser ablation; micromachining; ablation process; aspect ratios; electro-optic components; feature sizes; femtosecond lasers; femtosecond micromachining applications; precision laser micromachining system; precision shaping; submicron depths; Ceramics; Inorganic materials; Laser ablation; Laser applications; Lasers and electrooptics; Microelectronics; Micromachining; Optical materials; Polymers; Pulp manufacturing;
Conference_Titel :
Electronic Components and Technology Conference, 2001. Proceedings., 51st
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-7038-4
DOI :
10.1109/ECTC.2001.927720
