DocumentCode
3162299
Title
An Objective Method Of Assessing Metal Patterning Quality
Author
Stevenson, J.T.M. ; Gow, J. ; Serack, J.
Author_Institution
University Of Edinburgh
fYear
1988
fDate
22-23 Feb. 1988
Firstpage
29
Lastpage
33
Keywords
Automatic testing; Bars; Electrical fault detection; Etching; Geometry; Lithography; Plasma chemistry; Resists; Surface waves; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location
Long Beach, CA, USA
Type
conf
DOI
10.1109/ICMTS.1988.672924
Filename
672924
Link To Document