Title :
RF micromechanical switches that can be post processed on commercial MMICs
Author :
Sloan, L.R. ; Sullivan, C.T. ; Tigges, C.P. ; Sandoval, C.E. ; Palmer, D.W. ; Hietala, S. ; Christenson, T.R. ; Dyck, C.W. ; Plut, T.A. ; Schuster, G.R.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the “on” state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF
Keywords :
MMIC; coplanar waveguide components; micromechanical devices; microwave switches; 0.2 dB; 10 V; 200 mW; MMIC; RF characteristics; RF micromechanical switch; coplanar waveguide; design; low-temperature processing; on-state loss; post-processing; transistor chip; Distributed parameter circuits; Impedance; MMICs; Micromechanical devices; Microswitches; Power system relaying; Power transmission lines; Radar antennas; Radio frequency; Switches;
Conference_Titel :
Electronic Components and Technology Conference, 2001. Proceedings., 51st
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-7038-4
DOI :
10.1109/ECTC.2001.927743
