DocumentCode
3162401
Title
RF micromechanical switches that can be post processed on commercial MMICs
Author
Sloan, L.R. ; Sullivan, C.T. ; Tigges, C.P. ; Sandoval, C.E. ; Palmer, D.W. ; Hietala, S. ; Christenson, T.R. ; Dyck, C.W. ; Plut, T.A. ; Schuster, G.R.
Author_Institution
Sandia Nat. Labs., Albuquerque, NM, USA
fYear
2001
fDate
2001
Firstpage
323
Lastpage
326
Abstract
The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the “on” state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF
Keywords
MMIC; coplanar waveguide components; micromechanical devices; microwave switches; 0.2 dB; 10 V; 200 mW; MMIC; RF characteristics; RF micromechanical switch; coplanar waveguide; design; low-temperature processing; on-state loss; post-processing; transistor chip; Distributed parameter circuits; Impedance; MMICs; Micromechanical devices; Microswitches; Power system relaying; Power transmission lines; Radar antennas; Radio frequency; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2001. Proceedings., 51st
Conference_Location
Orlando, FL
ISSN
0569-5503
Print_ISBN
0-7803-7038-4
Type
conf
DOI
10.1109/ECTC.2001.927743
Filename
927743
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