Title :
A Microelectronic Test Structure For Thickness Determination Of Homogeneous Conducting Thin Films In VLSI Processing
Author :
Kim, J.S. ; Linholm, L.W. ; Barley, B.L. ; Hanes, M.H. ; Cresswell, M.W.
Author_Institution :
National Bureau Of Standards
Keywords :
Bridge circuits; Conductive films; Conductivity; Electrical resistance measurement; Microelectronics; Resistors; Testing; Thickness measurement; Transistors; Very large scale integration;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672925
