Title :
Characterization of AuSn Solder in Laser Die Attachment for Photonic Packaging Applications
Author :
Ying, Liu Ying ; Premachandran, C.S. ; Yoon, Seung Wook ; Ebin, Liao ; Nagarajan, Ranganathan ; Ramana, Pamidighantm V.
Author_Institution :
Inst. of Microelectron., Singapore
Abstract :
80 wt.% Au, 20 wt.% Sn solder is used in optoelectronics because it allows soldering in fluxless processes. Au-Sn solder is also applied in the field of RF and MEMS packaging. Normally the deposited solders are re-flowed after electroplating but it is also possible to use the bumps in the as-deposited condition. Au-Sn solder which has been reflowed consists of an Au pedestal with a eutectic solder cap on top. Reflow soldering is a cost effective approach for the flip chip technology or die attachment process. Using pick & place equipment the substrate is populated with the components. Soldering is performed afterwards in an oven. During soldering it is possible to utilize the self-alignment mechanism. In this study, Au-Sn besides 80 wt.% Au, 20 wt.% Sn solder composition is evaluated and characterized in evaporation deposition process for SiOB (silicon optical bench) applications. Multiple layers of thin Sn and Au solders are deposited one-by-one. The layer thickness is calculated and optimized to meet the desired solder composition. The deposited solder is evaluated using FIB (Focused Ion Beam) to observe the layer thickness uniformity. Micro-structural observations for deposited solder samples are conducted before and after solder reflow for melting. The composition is identified by chemical composition analysis (EDS - energy dispersive spectroscopy) and thermal analysis (DSC - differential scanning calorimetry). The interfacial reaction and morphology with Ti/Pt/Au UBM (under bump metallurgy) layers are also observed with different reflow conditions. Results of die shear for photonic diode attachment are shown.
Keywords :
X-ray chemical analysis; differential scanning calorimetry; electronics packaging; focused ion beam technology; gold alloys; integrated optoelectronics; laser materials processing; metallic thin films; microassembling; reflow soldering; solders; tin alloys; vacuum deposition; AuSn; DSC; EDS; FIB; Ti-Pt-Au; bump metallurgy; chemical composition analysis; die shear; differential scanning calorimetry; electroplating; energy dispersive spectroscopy; eutectic solder cap; evaporation deposition process; flip chip technology; fluxless processes; focused ion beam technology; interfacial reaction; laser die attachment process; layer thickness uniformity; melting process; microstructural observations; optoelectronics; photonic diode attachment; photonic packaging applications; pick-place equipment; reflow soldering; self-alignment mechanism; silicon optical bench applications; solder characterization; solder composition; thermal analysis; Chemical analysis; Costs; Flip chip; Gold; Micromechanical devices; Ovens; Packaging; Radio frequency; Reflow soldering; Tin;
Conference_Titel :
Electronics Packaging Technology Conference, 2007. EPTC 2007. 9th
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-1323-2
Electronic_ISBN :
978-1-4244-1323-2
DOI :
10.1109/EPTC.2007.4469823