Title :
Interconnect capacitance characterization for mos-ic process and circuit design
Author_Institution :
Philips Research Laboratories
Keywords :
Capacitance measurement; Circuit simulation; Circuit synthesis; Circuit testing; Conductors; Dielectrics; Electrical capacitance tomography; Integrated circuit interconnections; Parasitic capacitance; Routing;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672926
