• DocumentCode
    3162714
  • Title

    Interconnect capacitance characterization for mos-ic process and circuit design

  • Author

    Kortekaas, C.

  • Author_Institution
    Philips Research Laboratories
  • fYear
    1988
  • fDate
    22-23 Feb. 1988
  • Firstpage
    39
  • Lastpage
    44
  • Keywords
    Capacitance measurement; Circuit simulation; Circuit synthesis; Circuit testing; Conductors; Dielectrics; Electrical capacitance tomography; Integrated circuit interconnections; Parasitic capacitance; Routing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Conference_Location
    Long Beach, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672926
  • Filename
    672926
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3162714