A W-Band RF-MEMS Sliding Termination for Six-Port Reflectometer Calibration

Author

Schaeffer, W.J. ; Liu, Zhiyang ; Weikle, Robert M., III ; Barker, N. Scott

Author_Institution

Charles L. Brown Dept. of Electr. & Comput. Eng., Virginia Univ., Charlottesville, VA

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

799

Lastpage

802

Abstract

This paper presents the implementation of a W-band RF-MEMS sliding termination for use in calibrating a six-port network analyzer. This sliding termination is based on the distributed MEMS transmission line (DMTL) phase shifter. A novel through-the-substrate biasing technique is introduced for the microstrip phase shifter. This technique is based on a quarter-wavelength open stub acting as both an RF short as well as a capacitor in series with the MEMS bridge capacitance. Because of the series capacitor, the bridge capacitance ratio has been increased from 1.2 to 1.35. The measured results demonstrate from 82deg phase shift at 75 GHz to 205.6deg phase shift at 110 GHz

Keywords

calibration; micromechanical devices; microstrip components; network analysers; phase shifters; reflectometers; 110 GHz; 75 GHz; MEMS bridge capacitance; RF-MEMS; W-band; distributed MEMS transmission line phase shifter; microstrip phase shifter; quarter-wavelength open stub; six-port calibration; six-port network analyzer; six-port reflectometer calibration; sliding termination; through-the-substrate biasing technique; Bridge circuits; Calibration; Capacitance; Capacitors; Micromechanical devices; Microstrip; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Transmission lines; DMTL; RF-MEMS; phase shifter; six-port calibration;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. 36th European

Conference_Location

Manchester

Print_ISBN

2-9600551-6-0

Type

conf

DOI

10.1109/EUMC.2006.281040

Filename

4057939