Title :
A W-Band RF-MEMS Sliding Termination for Six-Port Reflectometer Calibration
Author :
Schaeffer, W.J. ; Liu, Zhiyang ; Weikle, Robert M., III ; Barker, N. Scott
Author_Institution :
Charles L. Brown Dept. of Electr. & Comput. Eng., Virginia Univ., Charlottesville, VA
Abstract :
This paper presents the implementation of a W-band RF-MEMS sliding termination for use in calibrating a six-port network analyzer. This sliding termination is based on the distributed MEMS transmission line (DMTL) phase shifter. A novel through-the-substrate biasing technique is introduced for the microstrip phase shifter. This technique is based on a quarter-wavelength open stub acting as both an RF short as well as a capacitor in series with the MEMS bridge capacitance. Because of the series capacitor, the bridge capacitance ratio has been increased from 1.2 to 1.35. The measured results demonstrate from 82deg phase shift at 75 GHz to 205.6deg phase shift at 110 GHz
Keywords :
calibration; micromechanical devices; microstrip components; network analysers; phase shifters; reflectometers; 110 GHz; 75 GHz; MEMS bridge capacitance; RF-MEMS; W-band; distributed MEMS transmission line phase shifter; microstrip phase shifter; quarter-wavelength open stub; six-port calibration; six-port network analyzer; six-port reflectometer calibration; sliding termination; through-the-substrate biasing technique; Bridge circuits; Calibration; Capacitance; Capacitors; Micromechanical devices; Microstrip; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Transmission lines; DMTL; RF-MEMS; phase shifter; six-port calibration;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281040
