• DocumentCode
    3163353
  • Title

    Low loss deep glass waveguides produced with dry silver electromigration process

  • Author

    Chuang, Ricky W. ; Lee, Chin C.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., California Univ., Irvine, CA, USA
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    655
  • Lastpage
    658
  • Abstract
    We report a simple but effective technology adopted to fabricate low-loss channel waveguides on a specially chosen glass substrate code name SBS450 without the presence of molten chemicals or liquid solutions. This technique encompasses a dry ion electromigration process that totally eliminate the needs of evaporating separate gold or aluminum film electrodes onto both sides of glass. In contrast to earlier ion exchange waveguides reported, a relatively high electrical field of 545 V/mm was applied to the glass to speed up the electromigration process and most important of all, to prevent silver ions that were driven into the glass from reducing into silver atom, a major contributor to waveguide loss. The channel waveguides thus fabricated showed no discolors or cracks, while the attenuation losses were later measured to be less than 0.2 dB/cm, using our 0.6328 μm He-Ne laser edge-coupling setup
  • Keywords
    electromigration; ion exchange; optical fabrication; optical glass; optical losses; optical waveguides; silver; 0.6328 micron; Ag; He-Ne laser edge-coupling; SBS450; attenuation loss; dry silver electromigration; electric field; fabrication; glass substrate; ion exchange; optical channel waveguide; Aluminum; Atomic beams; Chemical technology; Electrodes; Electromigration; Glass; Gold; Liquid waveguides; Silver; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2001. Proceedings., 51st
  • Conference_Location
    Orlando, FL
  • ISSN
    0569-5503
  • Print_ISBN
    0-7803-7038-4
  • Type

    conf

  • DOI
    10.1109/ECTC.2001.927799
  • Filename
    927799