DocumentCode :
3163353
Title :
Low loss deep glass waveguides produced with dry silver electromigration process
Author :
Chuang, Ricky W. ; Lee, Chin C.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Irvine, CA, USA
fYear :
2001
fDate :
2001
Firstpage :
655
Lastpage :
658
Abstract :
We report a simple but effective technology adopted to fabricate low-loss channel waveguides on a specially chosen glass substrate code name SBS450 without the presence of molten chemicals or liquid solutions. This technique encompasses a dry ion electromigration process that totally eliminate the needs of evaporating separate gold or aluminum film electrodes onto both sides of glass. In contrast to earlier ion exchange waveguides reported, a relatively high electrical field of 545 V/mm was applied to the glass to speed up the electromigration process and most important of all, to prevent silver ions that were driven into the glass from reducing into silver atom, a major contributor to waveguide loss. The channel waveguides thus fabricated showed no discolors or cracks, while the attenuation losses were later measured to be less than 0.2 dB/cm, using our 0.6328 μm He-Ne laser edge-coupling setup
Keywords :
electromigration; ion exchange; optical fabrication; optical glass; optical losses; optical waveguides; silver; 0.6328 micron; Ag; He-Ne laser edge-coupling; SBS450; attenuation loss; dry silver electromigration; electric field; fabrication; glass substrate; ion exchange; optical channel waveguide; Aluminum; Atomic beams; Chemical technology; Electrodes; Electromigration; Glass; Gold; Liquid waveguides; Silver; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2001. Proceedings., 51st
Conference_Location :
Orlando, FL
ISSN :
0569-5503
Print_ISBN :
0-7803-7038-4
Type :
conf
DOI :
10.1109/ECTC.2001.927799
Filename :
927799
Link To Document :
بازگشت