Title :
Dynamic response and modal analysis of micro-machined disk resonator for RF application
Author :
Chaudhuri, Ashesh Ray ; Chakraborty, Subha ; Bhattacharyya, Tarun K.
Author_Institution :
Dept. of Electron. & Electr. Commun. Eng., Indian Inst. of Technol., Kharagpur, India
Abstract :
A micro-machined disk resonator has been fabricated using POLYMUMPS process. The resonator has been characterized by laser doppler vibrometer. A detailed modal analysis has been carried out for the disk. The fundamental frequency of vibration of the disk has been estimated analytically and verified with the experimental results. The structure shows radial mode vibration at around 920 MHz which is suitable for RF applications.
Keywords :
Doppler measurement; dynamic response; micromechanical resonators; modal analysis; vibration measurement; POLYMUMPS process; RF application; dynamic response; laser Doppler vibrometer; micro-machined disk resonator; modal analysis; radial mode vibration; Boundary conditions; Electrodes; Integrated circuit technology; Modal analysis; Oscillators; Q factor; Radio frequency; Resonance; Resonant frequency; Vibrations; Disk; Resonance; Resonator; Vibration;
Conference_Titel :
Microwave Conference, 2009. APMC 2009. Asia Pacific
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2801-4
Electronic_ISBN :
978-1-4244-2802-1
DOI :
10.1109/APMC.2009.5384184
