DocumentCode
3163436
Title
Dynamic response and modal analysis of micro-machined disk resonator for RF application
Author
Chaudhuri, Ashesh Ray ; Chakraborty, Subha ; Bhattacharyya, Tarun K.
Author_Institution
Dept. of Electron. & Electr. Commun. Eng., Indian Inst. of Technol., Kharagpur, India
fYear
2009
fDate
7-10 Dec. 2009
Firstpage
516
Lastpage
519
Abstract
A micro-machined disk resonator has been fabricated using POLYMUMPS process. The resonator has been characterized by laser doppler vibrometer. A detailed modal analysis has been carried out for the disk. The fundamental frequency of vibration of the disk has been estimated analytically and verified with the experimental results. The structure shows radial mode vibration at around 920 MHz which is suitable for RF applications.
Keywords
Doppler measurement; dynamic response; micromechanical resonators; modal analysis; vibration measurement; POLYMUMPS process; RF application; dynamic response; laser Doppler vibrometer; micro-machined disk resonator; modal analysis; radial mode vibration; Boundary conditions; Electrodes; Integrated circuit technology; Modal analysis; Oscillators; Q factor; Radio frequency; Resonance; Resonant frequency; Vibrations; Disk; Resonance; Resonator; Vibration;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2009. APMC 2009. Asia Pacific
Conference_Location
Singapore
Print_ISBN
978-1-4244-2801-4
Electronic_ISBN
978-1-4244-2802-1
Type
conf
DOI
10.1109/APMC.2009.5384184
Filename
5384184
Link To Document