Title :
Statistical Significance Of Defect density Estimates
Author_Institution :
Hewlett-packard
Keywords :
Circuit testing; Density measurement; Design engineering; Fabrication; Integrated circuit technology; Integrated circuit testing; Integrated circuit yield; Process control; Production; Yield estimation;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672944
