Title :
Standard Defect Monitor
Author_Institution :
Hewlett Packard Corporation
Keywords :
Automatic testing; CMOS process; Circuit testing; Condition monitoring; Density measurement; Feedback loop; Laboratories; Manufacturing processes; Semiconductor device manufacture; Silicon;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672945
