Title :
Measurements of thickness of metal films in sandwich structures by the microwave reflection spectrum
Author :
Usanov, D.A. ; Skripal, AI V. ; Abramov, A.V. ; Bogolyubov, A.S. ; Kalinina, N.V.
Author_Institution :
Saratov State Univ.
Abstract :
The method for measurements of the thickness of nanometer metal films in sandwich structures by the microwave reflection spectrum had been proposed and implemented experimentally
Keywords :
metals; microwave reflectometry; sandwich structures; thickness measurement; metal films thickness; microwave reflection spectrum; nonhomogeneous media; sandwich structures; thickness measurement; Dielectric measurements; Frequency; Metal-insulator structures; Microwave measurements; Optical films; Reflection; Reflectivity; Sandwich structures; Substrates; Thickness measurement; Microwave measurements; metal-insulator structures; nonhomogeneous media; reflectance;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281071
