DocumentCode
3163684
Title
Nanoimprint lithography: opportunities and applications
Author
Montelius, L.
Author_Institution
Div. of Solid State Phys., Lund Univ., Sweden
fYear
2002
fDate
6-8 Nov. 2002
Firstpage
18
Lastpage
19
Abstract
In the first part of this presentation I will highlight the understanding about nanoimprint lithography (NIL) we have developed within the two EU projects that I have been privileged to coordinate, NANOTECH and CHANIL. In the second part I will concentrate on various applications that has been successfully implemented using NIL and the concerns related to NIL for applications. This will include fabrication of electronic devices such as three terminal ballistic devices, position sensitive radiation detectors, biosensors, high frequency nanoelectromechanical systems, development of materials and patterns to increase bio-compatability and lab-on-a-chip implementations allowing, for example, in-vitro studies of controlled motion of motor proteins. Then, finally in I will give conclude my talk and give some outlooks and prospects for the implementation of NIL in various application areas.
Keywords
lithography; nanotechnology; nanoimprint lithography; Biological materials; Biosensors; Fabrication; Frequency; In vitro; Lab-on-a-chip; Motion control; Nanoelectromechanical systems; Nanolithography; Radiation detectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-031-3
Type
conf
DOI
10.1109/IMNC.2002.1178522
Filename
1178522
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