• DocumentCode
    3163684
  • Title

    Nanoimprint lithography: opportunities and applications

  • Author

    Montelius, L.

  • Author_Institution
    Div. of Solid State Phys., Lund Univ., Sweden
  • fYear
    2002
  • fDate
    6-8 Nov. 2002
  • Firstpage
    18
  • Lastpage
    19
  • Abstract
    In the first part of this presentation I will highlight the understanding about nanoimprint lithography (NIL) we have developed within the two EU projects that I have been privileged to coordinate, NANOTECH and CHANIL. In the second part I will concentrate on various applications that has been successfully implemented using NIL and the concerns related to NIL for applications. This will include fabrication of electronic devices such as three terminal ballistic devices, position sensitive radiation detectors, biosensors, high frequency nanoelectromechanical systems, development of materials and patterns to increase bio-compatability and lab-on-a-chip implementations allowing, for example, in-vitro studies of controlled motion of motor proteins. Then, finally in I will give conclude my talk and give some outlooks and prospects for the implementation of NIL in various application areas.
  • Keywords
    lithography; nanotechnology; nanoimprint lithography; Biological materials; Biosensors; Fabrication; Frequency; In vitro; Lab-on-a-chip; Motion control; Nanoelectromechanical systems; Nanolithography; Radiation detectors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-031-3
  • Type

    conf

  • DOI
    10.1109/IMNC.2002.1178522
  • Filename
    1178522