Title :
Research of three-axis vibration sensor and calibration method based on MEMS
Author :
Gui, Tang ; Tao, Guo ; Qingzhi, Zhang ; Jie, Zhu
Author_Institution :
Key Lab. of Instrum. Sci. & Dynamic Meas., North Univ. of China, Taiyuan, China
Abstract :
Aerocraft flight test for multiple directions of vibration signals, we designed a three-axis MEMS-based vibration sensor. Paper-based three-axis MEMS vibration sensor starting the design process, detailed design of the whole process of the sensor. Highlighted in the design process should pay attention to the issues and practical applications for the sensor issues arising in the corresponding calibration methods to ensure the reliability of the sensor, and in practical applications with satisfactory results.
Keywords :
aerospace instrumentation; calibration; micromechanical devices; vibration measurement; aerocraft flight test; calibration method; design process; paper-based three-axis MEMS vibration sensor; three-axis MEMS-based vibration sensor; three-axis vibration sensor; vibration signals; Calibration; Filtering theory; Low pass filters; Micromechanical devices; Sensitivity; Temperature sensors; Vibrations; MEMS; calibration; reliability; three-axis vibration sensor;
Conference_Titel :
Consumer Electronics, Communications and Networks (CECNet), 2011 International Conference on
Conference_Location :
XianNing
Print_ISBN :
978-1-61284-458-9
DOI :
10.1109/CECNET.2011.5769042
