DocumentCode
3163849
Title
Temperature Control In Wafer-level Testing Of Large Multi-segment Electromigration Test Structures
Author
Zamani, Nasser ; Lin, Yu-Sang
Author_Institution
California Institute Of Technology
fYear
1988
fDate
22-23 Feb. 1988
Firstpage
138
Lastpage
142
Keywords
Electromigration; Heating; Isothermal processes; Metallization; Monitoring; Temperature control; Temperature measurement; Temperature sensors; Testing; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location
Long Beach, CA, USA
Type
conf
DOI
10.1109/ICMTS.1988.672949
Filename
672949
Link To Document