Title :
Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition
Author :
Miyashita, H. ; Ono, T. ; Esashi, M.
Author_Institution :
Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan
Abstract :
We had reported that the growth of carbon nanotubes (CNT) was enhanced by electric field with hot-filament chemical vapor deposition (HF-CVD), and SPM probe with an individual CNT was successfully fabricated. This paper describes the growth technique of a freestanding CNT between two opposed silicon electrodes with the electric field enhanced method.
Keywords :
carbon nanotubes; chemical vapour deposition; electric field effects; C; Si; electric field enhanced growth; freestanding carbon nanotube bridge; hot-filament chemical vapor deposition; silicon electrode; Bridges; Carbon nanotubes; Chemical vapor deposition; Conductivity; Electrodes; Etching; Iron; Nickel; Scanning probe microscopy; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178531
