Title :
CMOS Compatible Switched MEMS Capacitors Up to 220 GHz Applications
Author :
Vaha-Heikkila, Tauno ; Ylonen, Mari
Author_Institution :
MilliLab, VTT Tech. Res. Centre of Finland
Abstract :
Very wideband switched MEMS capacitors have been designed and fabricated using CMOS compatible surface micromachining process. On-wafer measurement results are presented at G-band (140-220 GHz) up to 220 GHz showing that MEMS components can be modeled accurately with lumped elements and transmission line models
Keywords :
CMOS integrated circuits; capacitors; micromachining; micromechanical devices; millimetre wave circuits; transmission line theory; 140 to 220 GHz; CMOS compatible surface micromachining process; MEMS components; lumped elements; on-wafer measurement; transmission line models; very wideband switched MEMS capacitors; CMOS process; CMOS technology; Capacitors; Distributed parameter circuits; Fabrication; Frequency; Micromechanical devices; Millimeter wave circuits; Millimeter wave technology; Wideband;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281116
