Title :
Micro/nano fabrication for surface emitting lasers and optical MEMS
Author_Institution :
Microsystem Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
Vertical cavity surface emitting lasers (VCSELs) have been widely used for short reach photonic networks because of their excellent performances and high productivity. Also, optical MEMS devices have been attracting much interest for photonic switching and routing. A micro/nano fabrication technology is a key for realizing new functions and photonic integration. In this talk, micro/nano fabrication for VCSELs and tunable photonic devices based on optical MEMs is described. Device performances and future prospects will be presented.
Keywords :
micro-optics; nanotechnology; optical fabrication; optical tuning; surface emitting lasers; microfabrication technology; nanofabrication technology; optical MEMS device; tunable photonic device; vertical cavity surface emitting laser; Microelectromechanical devices; Micromechanical devices; Optical device fabrication; Optical devices; Photonics; Productivity; Routing; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178556
