Title :
CMOS Compatible Fast Switching RF MEMS Varactors
Author :
Lacroix, B. ; Pothier, A. ; Crunteanu, A. ; Cibert, C. ; Dumas-Bouchiat, F. ; Champeaux, C. ; Catherinot, A. ; Blondy, P.
Author_Institution :
XLIM Res. Inst., Limoges
Abstract :
This paper presents fast switching RF-MEMS CMOS compatible varactors. By introducing bended sides on a conventional air bridge, it is shown experimentally that the resonance frequency of aluminum bridges is increased by a factor 2.5. Based on miniature bridges design (around ten times smaller than standard MEMS varactors), presented devices allow to reach higher mechanical resonance frequencies, resulting in faster switching times. Several designs are presented with recorded resonance frequencies between 1 and 3 MHz and measured switching time under 600 ns
Keywords :
CMOS integrated circuits; bridge circuits; microswitches; varactors; 600 ns; CMOS compatible varactors; RF MEMS varactors; air bridge; aluminum bridges; fast switching varactors; mechanical resonance frequencies; Biomembranes; Bridge circuits; Micromechanical devices; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Springs; Switches; Switching circuits; Varactors; High-speed integrated circuits; RF MEMS; varactors;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281119
